一種異常狀態即時監視系統與方法。首先，收集製程或設備操作之歷史數據，然後利用相關統計分析技術，對製程或設備異常之數據資料進行分析。根據分析結果選取至少一管制圖模件，並將模件參數與模件間之資料連結設定儲存於應用伺服器資料庫中。依據數據分析後所得之異常狀態原因、模件參數與資料連結設定，採用相關建模技術，並整合管制圖模件以建立一即時狀態監視模件，然後整合多個監視模件而成為一複合型之監視模件。最後，利用複合型之監視模件，並根據即時製程數據或資料庫中之歷史數據，顯示上述製程或上述設備之操作狀態。_x000D_A real-time monitoring system for abnormal situations and method thereof. Historical data of processes or tools is first collected and abnormal data is then analyzed using statistical analysis methods. At least a control chart model is selected according to the analyzing result and model parameters and data linking settings related to models are stored in an applied servo database. Next, a real-state monitoring model is established by integrating control chart models, using model-establishing technologies, according to abnormal-situation reasons, the model parameters, and the data linking settings, and then several monitoring models are integrated as a complex monitoring model. Finally, operating states of the processes or tools are displayed on the complex monitoring model according to real process data or the historical data in the database.
一種異常狀態即時監視系統與方法。首先，收集製程或設備操作之歷史數據，然後利用相關統計分析技術，對製程或設備異常之數據資料進行分析。根據分析結果選取至少一管制圖模件，並將模件參數與模件間之資料連結設定儲存於應用伺服器資料庫中。依據數據分析後所得之異常狀態原因、模件參數與資料連結設定，採用相關建模技術，並整合管制圖模件以建立一即時狀態監視模件，然後整合多個監視模件而成為一複合型之監視模件。最後，利用複合型之監視模件，並根據即時製程數據或資料庫中之歷史數據，顯示上述製程或上述設備之操作狀態。_x000D_A real-time monitoring system for abnormal situations and method thereof. Historical data of processes or tools is first collected and abnormal data is then analyzed using statistical analysis methods. At least a control chart model is selected according to the analyzing result and model parameters and data linking settings related to models are stored in an applied servo database. Next, a real-state monitoring model is established by integrating control chart models, using model-establishing technologies, according to abnormal-situation reasons, the model parameters, and the data linking settings, and then several monitoring models are integrated as a complex monitoring model. Finally, operating states of the processes or tools are displayed on the complex monitoring model according to real process data or the historical data in the database.