Capacitive ultrasonic transducer and method of fabricating the same(電容式超音波換能裝置及其製作方法)
- 經濟部產業技術司–專利資料集 @ 經濟部
專利名稱-中文Capacitive ultrasonic transducer and method of fabricating the same(電容式超音波換能裝置及其製作方法)的核准國家是韓國, 執行單位是工研院辨識中心, 產出年度是97, 專利性質是發明, 計畫名稱是無線射頻辨識系統關鍵技術發展三年計畫, 專利發明人是張明暐 郭忠柱 鄧澤民 鍾禎元, 證書號碼是10-0791821.
| 序號 | 4438 |
| 產出年度 | 97 |
| 領域別 | (空) |
| 專利名稱-中文 | Capacitive ultrasonic transducer and method of fabricating the same(電容式超音波換能裝置及其製作方法) |
| 執行單位 | 工研院辨識中心 |
| 產出單位 | (空) |
| 計畫名稱 | 無線射頻辨識系統關鍵技術發展三年計畫 |
| 專利發明人 | 張明暐 郭忠柱 鄧澤民 鍾禎元 |
| 核准國家 | 韓國 |
| 獲證日期 | (空) |
| 證書號碼 | 10-0791821 |
| 專利期間起 | (空) |
| 專利期間訖 | (空) |
| 專利性質 | 發明 |
| 技術摘要-中文 | 本發明係提供一種電容式超音波換能裝置及其製作方法。該超音波換能裝置係利用多層金屬堆疊與研磨技術製作而成之結構。該超音波換能裝置之製作方法主要利用金屬材料作為犧牲層以及主體結構之材料，經過多次堆疊與研磨後再配合微影以及犧牲層蝕刻之技術以製作出振動所需之腔室以及結構。此外，本發明更在該超音波換能裝置之上以金屬材料沉積製作出保護凸塊以保護該超音波換能裝置之主體結構。本發明具有別於傳統超音波換能裝置之結構外，在製作方法上更省去電極之製作、高溫製成以及退火之步驟，使得本發明之超音波換能裝置具有製程容易、降低製造成本之優點。此外本發明之超音波換能裝置更可整合電子電路裝置，以廣泛的應用於消費性電子產品、生物醫學以及工程之領域。 A capacitive ultrasonic transducer and method of fabricating the same are disclosed, whereas the capacitive ultrasonic transducer is a stacking of multiple metal layers. The fabrication method of the invention is characterized in that: the structure and cavity of excitation are formed by lithographing and etching the sacrificial layer and other stacking layers, whereas the sacrificial layer and the other stacking layer are made of metal, and moreover, a protective bulk is formed on the capacitive ultrasonic transducer by a means of metal depositing. It is noted that not only the structure of capacitive ultrasonic transducer of the invention has a bulk for protection, which is different to that of a conventional capacitive ultrasonic transducer, but also the method of fabricating the same can do without the steps of electrode formation, high-temperature processing and annealing, which enable the method to have simplified process and thus cost less than that of conventional methods. The capacitive ultrasonic transducer can be integrated into a variety of integrated circuit that enables the same to be vastly implemented in consumer electronic products, and products of bio |
| 技術摘要-英文 | (空) |
| 聯絡人員 | 李露蘋 |
| 電話 | 03-59117812 |
| 傳真 | 03-5917431 |
| 電子信箱 | oralp@itri.org.tw |
| 參考網址 | http://www.patentportfolio.itri.org.tw |
| 備註 | 0 |
| 特殊情形 | (空) |
| 同步更新日期 | 2019-07-24 |
序號4438 |
產出年度97 |
領域別(空) |
專利名稱-中文Capacitive ultrasonic transducer and method of fabricating the same(電容式超音波換能裝置及其製作方法) |
執行單位工研院辨識中心 |
產出單位(空) |
計畫名稱無線射頻辨識系統關鍵技術發展三年計畫 |
專利發明人張明暐 郭忠柱 鄧澤民 鍾禎元 |
核准國家韓國 |
獲證日期(空) |
證書號碼10-0791821 |
專利期間起(空) |
專利期間訖(空) |
專利性質發明 |
技術摘要-中文本發明係提供一種電容式超音波換能裝置及其製作方法。該超音波換能裝置係利用多層金屬堆疊與研磨技術製作而成之結構。該超音波換能裝置之製作方法主要利用金屬材料作為犧牲層以及主體結構之材料，經過多次堆疊與研磨後再配合微影以及犧牲層蝕刻之技術以製作出振動所需之腔室以及結構。此外，本發明更在該超音波換能裝置之上以金屬材料沉積製作出保護凸塊以保護該超音波換能裝置之主體結構。本發明具有別於傳統超音波換能裝置之結構外，在製作方法上更省去電極之製作、高溫製成以及退火之步驟，使得本發明之超音波換能裝置具有製程容易、降低製造成本之優點。此外本發明之超音波換能裝置更可整合電子電路裝置，以廣泛的應用於消費性電子產品、生物醫學以及工程之領域。 A capacitive ultrasonic transducer and method of fabricating the same are disclosed, whereas the capacitive ultrasonic transducer is a stacking of multiple metal layers. The fabrication method of the invention is characterized in that: the structure and cavity of excitation are formed by lithographing and etching the sacrificial layer and other stacking layers, whereas the sacrificial layer and the other stacking layer are made of metal, and moreover, a protective bulk is formed on the capacitive ultrasonic transducer by a means of metal depositing. It is noted that not only the structure of capacitive ultrasonic transducer of the invention has a bulk for protection, which is different to that of a conventional capacitive ultrasonic transducer, but also the method of fabricating the same can do without the steps of electrode formation, high-temperature processing and annealing, which enable the method to have simplified process and thus cost less than that of conventional methods. The capacitive ultrasonic transducer can be integrated into a variety of integrated circuit that enables the same to be vastly implemented in consumer electronic products, and products of bio |
技術摘要-英文(空) |
聯絡人員李露蘋 |
電話03-59117812 |
傳真03-5917431 |
電子信箱oralp@itri.org.tw |
參考網址http://www.patentportfolio.itri.org.tw |
備註0 |
特殊情形(空) |
同步更新日期2019-07-24 |