一種多晶矽之結晶形成方法,係為在基板上先形成非晶矽層,再於非晶矽層上的部份區域依序形成保護層與反射層堆疊,其中反射層係為可反射雷射的金屬材質,而保護層則可阻絕金屬污染。在後續進行準分子雷射加熱以使非晶矽層發生結晶時,位於保護層與反射層堆疊下方之非晶矽層會先產生結晶成核點。然後再橫向擴展結晶範圍,使非晶矽層能長出微米等級且規則排列之晶粒而轉變為多晶矽層。An amorphous silicon layer is formed on a substrate, and then a protective layer and a reflective layer are formed in turn to form a film stack on portions of the amorphous silicon layer. The reflective layer is a metal layer with reflectivity of laser, and the protective layer is able to prevent metal pollution. When an excimer laser heating is performed to crystallize the amorphous silicon, nucleation sites are formed in the amorphous silicon layer under the film stack of the protective layer and the reflective layer. Next, laterally expanding crystallization is occurred in the amorphous silicon layer to form poly-silicon having grains with size of micrometer and fine order.
技術摘要-中文: 一種多晶矽之結晶形成方法,係為在基板上先形成非晶矽層,再於非晶矽層上的部份區域依序形成保護層與反射層堆疊,其中反射層係為可反射雷射的金屬材質,而保護層則可阻絕金屬污染。在後續進行準分子雷射加熱以使非晶矽層發生結晶時,位於保護層與反射層堆疊下方之非晶矽層會先產生結晶成核點。然後再橫向擴展結晶範圍,使非晶矽層能長出微米等級且規則排列之晶粒而轉變為多晶矽層。An amorphous silicon layer is formed on a substrate, and then a protective layer and a reflective layer are formed in turn to form a film stack on portions of the amorphous silicon layer. The reflective layer is a metal layer with reflectivity of laser, and the protective layer is able to prevent metal pollution. When an excimer laser heating is performed to crystallize the amorphous silicon, nucleation sites are formed in the amorphous silicon layer under the film stack of the protective layer and the reflective layer. Next, laterally expanding crystallization is occurred in the amorphous silicon layer to form poly-silicon having grains with size of micrometer and fine order.
本發明為一種元件轉貼之方法,係在製作元件前先設置犧牲層,再運用溼式側向蝕刻方式或溼式側向蝕刻搭配機械式剝離的方式,將犧牲層去除或剝離,使元件與基板分離,此分離之元件可轉貼至另一基板,達到適用於各種產品設計及應用的需要。The present invention relates to a method for transferably pasting a device. A sacrificing layer is positioned before the device is manufactured. Then, a method for lateral wet etching or a method for lateral wet etching with mechanical stripping is applied for removing or stripping the sacrificing layer so as to separate the device and the substrate. This separated device is transferably pasted on another substrate so as to meet the requirements for various products and applications.
技術摘要-中文: 本發明為一種元件轉貼之方法,係在製作元件前先設置犧牲層,再運用溼式側向蝕刻方式或溼式側向蝕刻搭配機械式剝離的方式,將犧牲層去除或剝離,使元件與基板分離,此分離之元件可轉貼至另一基板,達到適用於各種產品設計及應用的需要。The present invention relates to a method for transferably pasting a device. A sacrificing layer is positioned before the device is manufactured. Then, a method for lateral wet etching or a method for lateral wet etching with mechanical stripping is applied for removing or stripping the sacrificing layer so as to separate the device and the substrate. This separated device is transferably pasted on another substrate so as to meet the requirements for various products and applications.
一種多晶矽薄膜電晶體的製作方法,係為在基板上形成非晶矽層之後,即對非晶矽層進行圖案化,以形成矽島圖形,使提前定義出元件主動區域。接著,利用單發長脈衝雷射光束,照射矽島圖形,以誘發矽島圖形內產生超級橫向長晶行為,而由非晶矽轉變為多晶矽。最後,再依序進行後續薄膜電晶體製作流程,即完成多晶矽薄膜電晶體之製作。An amorphous silicon (a-Si) layer is first formed on a substrate, and the a-Si layer is next patterned to form silicon islands for defining device active regions. Then, a single shot laser beam with long pulse is utilized to irradiate each silicon island, and lateral growth crystallization is induced in each silicon island for transforming a-Si into polycrystalline silicon (poly-Si). Finally, the general subsequent processes for thin film transistor (TFT) fabrication are performed in turn to fabricate poly-Si TFTs.
技術摘要-中文: 一種多晶矽薄膜電晶體的製作方法,係為在基板上形成非晶矽層之後,即對非晶矽層進行圖案化,以形成矽島圖形,使提前定義出元件主動區域。接著,利用單發長脈衝雷射光束,照射矽島圖形,以誘發矽島圖形內產生超級橫向長晶行為,而由非晶矽轉變為多晶矽。最後,再依序進行後續薄膜電晶體製作流程,即完成多晶矽薄膜電晶體之製作。An amorphous silicon (a-Si) layer is first formed on a substrate, and the a-Si layer is next patterned to form silicon islands for defining device active regions. Then, a single shot laser beam with long pulse is utilized to irradiate each silicon island, and lateral growth crystallization is induced in each silicon island for transforming a-Si into polycrystalline silicon (poly-Si). Finally, the general subsequent processes for thin film transistor (TFT) fabrication are performed in turn to fabricate poly-Si TFTs.